Intuitive Maskless lithography system
Smart Print UV is a maskless lithography equipment, based on a DMD projection technology, compatible with a wide range of resists and substrates.
Smart Print UV can produce any 2D shapes at micron resolution without the need for a hard mask.
Smart Print UV is perfectly designed for any application fields requiring surface micro patterning such as microfluidics, biotechnologies and microelectronics.
Test and adjust your pattern quickly.
No need for a hard mask, lithograph directly your sample in a few seconds.
Our projection to objective technology gives user access to four different writing resolution to combine writing precision and speed.
With our "quick release" system, the resolution can be changed in just a couple of seconds without any calibration step.
The feedback camera coupled with the secondary 590 nm light source allows direct overlay of the design on top of the sample, making the alignment steps very intuitive for the user.
Our objective range has been carefully selected with a long working distance (up to 3 cm) to make Smart Print UV a contactless technology and thus compatible with non-standard substrates (non-flat, flexible, thick).
Adapt the writing resolution to your design. Use a wide field of view to pattern quickly with 1x objective, and achieve down to 1.5µm minimal feature size using the 10x objective.
Benefit from Smart Print UV high compacity.
Dimensions : W: 52cm, D: 52cm, H: 69cm.
It can adapt to clean room environments and is self-standing with no external equipment required.
| System | Standard | Advanced |
| Light source | Exposure : 385nm; alignment : 590nm | |
| Minimum feature size | 1.5µm | |
| Stitching precision | 2µm | <1µm |
| Alignment accuracy (for 1cm² printed area) | 2µm | 1µm |
| Maximum exposure area | 70 x 70 mm² | 118 x 118 mm² |
| Substrate size | Up to 4″ | Up to 5″ |
| Writing speed (6µm resolution) | 77 mm²/min | 220 mm²/min |
| System dimensions | W:52cm, D:52cm, H:69cm | |
| Objectives | 1x | 2.5x | 5x | 10x |
| Writing fields (mm) | 10.56 x 5.94 | 4.2 x 2.4 | 2.1 x 1.2 | 1.06 x 0.59 |
| Smallest features (µm) | 15 | 6 | 3 | 1.5 |
Options and accessories
We use the Smart Print for the fabrication of all our next-generation solar cell prototypes, which are based on III-V and 2D materials. Having the Smart Print has changed the way we work. We have total flexibility to adapt the lithography design to the demands of each particular device or process. It offers us the flexibility of e-beam lithography, but in a cost-effective, easy to use photolithography system.
We use the Smart Print for the fabrication of all our next-generation solar cell prototypes, which are based on III-V and 2D materials. Having the Smart Print has changed the way we work. We have total flexibility to adapt the lithography design to the demands of each particular device or process. It offers us the flexibility of e-beam lithography, but in a cost-effective, easy to use photolithography system.
