SmartPrint UV is a maskless lithography equipment, based on a DMD projection technology, compatible with a wide range of resists and substrates.
SmartPrint UV can produce any 2D shapes at micron resolution without the need for a hard mask.
SmartPrint UV is perfectly designed for any application fields requiring surface micro patterning such as microfluidics, biotechnologies and micro-electronics.
Compatible with i, h and g-line photoresistsSmartPrint-UV is equipped with a 385 nm LED source to be compatible with standard i, h and g-line photoresists such as SU8 or AZ® 1500 series.
Work with a wide range of substratesOur objective range has been carefully selected with a long working distance (up to 3 cm) to make SP-UV a contactless technology and thus compatible with non-standard substrates (non-flat, flexible, thick).
Writing resolution down to 1.5µm
Adjustable writing field and resolution
Our projection to objective technology gives user access to four different writing resolution to combine writing precision and speed.
With our "quick release" system, the resolution can be changed in just a couple of seconds without any calibration step.
Compatible with any sample size up to 5" square
Intuitive alignment method
The feedback camera coupled with the secondary 590 nm light source allows direct overlay of the design on top of the sample, making the alignment steps very intuitive for the user.
Time and money saving
No need for a hard mask, lithograph directly your sample in a few seconds.
Tabletop with small footprint
Benefit from SmartPrint UV high compacity.
Dimensions : W:52cm, D:52cm, H:69cm
|Light source||Exposure : 385nm; alignment : 590nm|
|Minimum feature size||1.5µm|
|Alignment accuracy (for 1cm² printed area)||2µm||1µm|
|Maximum exposure area||70 x 70 mm²||110 x 110 mm²|
|Substrate size||Up to 4"||Up to 5"|
|Writing speed (6µm resolution)||77 mm²/min||220 mm²/min|
|System dimensions||W:52cm, D:52cm, H:69cm|
|Computer||Win10 Pro, 24" Full HD screen|
|SFT Print software||Machine control, step-and-repeat, automatic dose test,
|SFT converter||Conversion of standard CAD formats (gdsii, dxf, cif, oas) to machine format.
CAD software included.
|Options and accessories|
|>Multiple sample holder (glass-slide, 4" wafer...)|
|>Objectives (see below)|
|Writing fields (mm)||10.56 x 5.94||4.2 x 2.4||2.1 x 1.2||1.06 x 0.59|
|Smallest features (µm)||15||6||3||1.5|